Ga2O3-β Single Crystal Substrate

Orientation: <-201> +/-0.7° 

• Lattice Constant: a=12.23A, b=3.04A, c=5.80A, ß=103.7°
• Polishing: one side polished
• Surface roughness: Ra<5A

Orientation: <010> +/-1° 

• Lattice Constant: a=12.23A, b=3.04A, c=5.80A, ß=103.7°
• Polishing: two sides polished
• Front surface finish: Epi-polished, RMS <0.5nm; Back surface finish: Optical polished

Orientation: <100> +/-1° 

• Lattice Constant: a=12.23A, b=3.04A, c=5.80A, ß=103.7°
• Polishing: one side polished
• Surface roughness: Ra<15A