About this item

• High-Speed Precision Control: maximum speed up to 12,000 RPM with 1 RPM resolution and acceleration up to 30,000 RPM/s, enabling rapid ramping and uniform thin-film coating
• Multi-Step Touchscreen Programming: stores up to 10 programs with 10 steps each; spin speed, acceleration, and time parameters are easily configured via the touchscreen interface
• Integrated Safety Monitoring: lid interlock and vacuum sensor ensure operation only when the chamber is sealed; vacuum monitoring below -0.04 MPa helps prevent substrate detachment during high-speed rotation
• Wide Substrate Compatibility: supports substrates from (<10 mm) to 152.4 mm (6 inch); includes 10 mm (0.39 inch), 25 mm (0.98 inch), and 50.8 mm (2 inch) vacuum chucks, with custom options available
• Compact Laboratory Design: compact footprint (295 x 370 x 270 mm) and 12 kg weight, suitable for gloveboxes, fume hoods, and clean benches, with adjustable feet for stable placement